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Effect of the sputtering parameters on the structure and properties of Cu3N thin film materials

✍ Scribed by Xianyi Qian; Zhixin Huang; Zengli Cui; Jihua Guo

Publisher
Wuhan University of Technology
Year
2010
Tongue
English
Weight
191 KB
Volume
25
Category
Article
ISSN
1000-2413

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