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Effect of the sensor structure on the stability of Ga2O3 sensors for reducing gases

✍ Scribed by M. Fleischer; L. Höllbauer; H. Meixner

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
674 KB
Volume
18
Category
Article
ISSN
0925-4005

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✍ F. Réti; M. Fleischer; H. Meixner; J. Giber 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 495 KB

The electrical conductivity of sputtered 2 m thick films of the oxide semiconductor B-Ga203 was studied in function of the partial pressure of CO or Hz above the solid and also in the presence of CO +O,, H,+Q and CO +H, mixtures. The concentrations of the examined gases varied in the range 0.01-l vo