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Effect of the processing method on the treeing resistance of polymeric dielectrics

โœ Scribed by Gefle, O. S.; Lebedev, S. M.

Book ID
118810063
Publisher
Springer
Year
2012
Tongue
English
Weight
992 KB
Volume
55
Category
Article
ISSN
1573-9228

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## Synopsis .A new method of evaluation of the effect of electron beam on the latent changes in degrading polymer resists has been developed on the base of measurement of the developing curve under an interference microscope. An evaluation procedure using the unit parameters (film thickness and de