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Effect of the plasma parameters on the properties of titanium nitride thin films grown by laser ablation

✍ Scribed by L. Escobar-Alarcón; E. Camps; M.A. Castro; S. Muhl; J.A. Mejia-Hernandez

Book ID: 118297195
Publisher: Springer
Year: 2005
Tongue: English
Weight: 654 KB
Volume: 81
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-005-3306-1

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