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Effect of the oxygen pressure during sputtering on the properties of thin CuOx films

✍ Scribed by G. Beensh-Marchwicka; L. Kròl-Stȩpniewska; M. Słaby


Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
322 KB
Volume
88
Category
Article
ISSN
0040-6090

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