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Effect of the nitrogen partial pressure on the preferred orientation of TiN thin films

✍ Scribed by H. H. Yang; J. H. Je; K. -B. Lee

Publisher: Springer
Year: 1995
Tongue: English
Weight: 198 KB
Volume: 14
Category: Article
ISSN: 0261-8028
DOI: 10.1007/bf00422660

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