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Effect of the deposition process and substrate temperature on the microstructure defects and electrical conductivity of molybdenum thin films

✍ Scribed by Rafaja, D.; Köstenbauer, H.; Mühle, U.; Löffler, C.; Schreiber, G.; Kathrein, M.; Winkler, J.

No coin nor oath required. For personal study only.

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