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Effect of the deposition conditions on the morphology and bonding structure of SiCN films

✍ Scribed by Wenjuan Cheng; Jinchun Jiang; Yang Zhang; Hesun Zhu; Dezhong Shen


Book ID
113780744
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
485 KB
Volume
85
Category
Article
ISSN
0254-0584

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