Effect of the composition of electrolyte on separation of porous silicon film by electrochemical etching
โ Scribed by Solanki, C. S. ;Bilyalov, R. R. ;Poortmans, J. ;Celis, J.-P. ;Nijs, J.
- Book ID
- 105362388
- Publisher
- John Wiley and Sons
- Year
- 2003
- Tongue
- English
- Weight
- 172 KB
- Volume
- 197
- Category
- Article
- ISSN
- 0031-8965
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The optical response of n-type porous silicon is investigated using spectroscopic ellipsometry in the energy range of 1.5 -5 eV. The close interrelationship between the microstructure and electronic states is examined on (1 0 0) oriented n-type single crystal silicon wafers anodically etched for di
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