Effect of target oxidation on reactive sputtering rates of titanium in argon-oxygen plasmas
โ Scribed by Lee F. Donaghey; Kenneth G. Geraghty
- Publisher
- Elsevier Science
- Year
- 1976
- Tongue
- English
- Weight
- 534 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0040-6090
No coin nor oath required. For personal study only.
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