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Effect of surface microroughness on the optical constants of semiconductors

โœ Scribed by K. Jezierski; J. Misiewicz


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
206 KB
Volume
65
Category
Article
ISSN
0030-4018

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In this study, we show that the optical constants of sputter-deposited chromium depend on the argon pressure used for the deposition. Higher argon pressure gives lower extinction coefficients. Sheet resistance measurements show that those materials with lower extinction coefficients also have lower