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Effect of surface composition on the growth rates of silicon carbide by CVD

✍ Scribed by Tsutomu Kaneto; Takashi Okuno; Isao Kabe

Book ID: 107790713
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 218 KB
Volume: 108
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(91)90381-e

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