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Effect of Substrate Temperature on the Opto-Electrical Propertites of Ti Doped ITO Films Deposited by RF Magnetron Sputtering

✍ Scribed by Ma, Rui Xin; Li, Shi Na; Suo, Guo Quan

Book ID
120433110
Publisher
Trans Tech Publications, Ltd.
Year
2012
Tongue
English
Weight
585 KB
Volume
602-604
Category
Article
ISSN
1662-8958

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Effects of substrate temperature on properties of ITO–ZnO composition spread films fabricated by combinatorial RF magnetron sputtering
✍ Gi-Seok Heo; In-Gi Gim; Jong-Woon Park; Kwang-Young Kim; Tae-Won Kim πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 696 KB

We have fabricated ITO-ZnO composition spread films to investigate the effects of substrate temperature on their electrical and optical properties by using combinatorial RF magnetron sputtering. It turned out by X-ray measurement that the film with zinc contents above 16.0 at% [Zn/(In+Zn+Sn)] showed