✦ LIBER ✦

Effect of substrate material on phase evolution in reactively sputtered Cr-Al-N films

✍ Scribed by Y. Sun; Y. H. Wang; H. P. Seow

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Substrate Bias Voltage Effect on Co-Cr S

✍ Yamashita, N.; Ohkoshi, M.; Honda, S.; Kusuda, T. 📂 Article 📅 1985 🏛 Institute of Electrical and Electronics Engineers ⚖ 250 KB

Substrate effects in magnetron sputterin

✍ J Veldeman; H Jia; M Burgelman 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 272 KB

Influence of substrate temperature on ph

✍ A. Saenz; D. Chavarri; R. Hernandez; V. M. Castaño 📂 Article 📅 2001 🏛 Maney Publishing 🌐 English ⚖ 154 KB

Substrate effect on the formation of ω-p

✍ D. Pilloud; J.F. Pierson; C. Rousselot; F. Palmino 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 187 KB

Effect of Si in reactively sputtered Ti-

✍ X. Sun; E. Kolawa; S. Im; C. Garland; M.-A. Nicolet 📂 Article 📅 1997 🏛 Springer 🌐 English ⚖ 264 KB

Effect of Substrate Material on Growth o

✍ Satoh, K.; Okuda, T.; Yamamoto, H.; Onodera, H.; Nakamichi, I. 📂 Article 📅 1990 🏛 Institute of Electrical and Electronics Engineers ⚖ 773 KB