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Effect of substrate bias voltage on corrosion of TiN/Ti multilayers deposited by magnetron sputtering

โœ Scribed by M. Flores; L. Huerta; R. Escamilla; E. Andrade; S. Muhl


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
775 KB
Volume
253
Category
Article
ISSN
0169-4332

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