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Effect of silicon surface cleaning procedures on oxidation kinetics and surface chemistry

✍ Scribed by J.M. Delarios; C.R. Helms; D.B. Kao; B.E. Deal

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 460 KB
Volume: 30
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(87)90068-7

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