Effect of SIIS on work function of self-aligned PtSi FUSI metal-gated capacitors

✍ Scribed by van Dal, M.J.H.; Pourtois, G.; Cunniffe, J.; Veloso, A.; Lauwers, A.; Maex, K.; Kittl, J.A.

• Book ID: 114618235
• Publisher: IEEE
• Year: 2006
• Tongue: English
• Weight: 225 KB
• Volume: 53
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2006.872360