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Effect of SF6 Addition to a High-Pressure Nitrogen Laser

โœ Scribed by Maeda, Mitsuo; Yamashita, Takashi; Miyazoe, Yasushi


Book ID
111880019
Publisher
Institute of Pure and Applied Physics
Year
1978
Tongue
English
Weight
268 KB
Volume
17
Category
Article
ISSN
0021-4922

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Dose and pressure dependence of silicon
โœ H.R. Dehghanpour; P. Parvin; B. Sajad; S.S. Nour-Azar ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 856 KB

ArF excimer laser radiation on Si surface at controlled SF 6 atmosphere creates a microstructure whose alteration at various UV doses and SF 6 pressures are investigated in this work. Moreover, a rigorous model has been presented here regarding the experiments based on the micro-fluid mechanical pro