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Effect of rinsing and drying on silicon surface cleaning for epitaxial growth

✍ Scribed by Hyoun Woo Kim; Kwang-sik Kim; Woon-suk Hwang; Rafael Reif

Publisher: TechnoPress
Year: 2002
Tongue: English
Weight: 353 KB
Volume: 8
Category: Article
ISSN: 1598-9623
DOI: 10.1007/bf03027244

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