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Effect of RF Negative Bias on the Structure and Performance of Diamond-Like Carbon Films in ECR Plasma

✍ Scribed by Sang, Li Jun; Chen, Qiang; Liu, Zhong Wei; Wang, Zheng Duo

Book ID: 121862154
Publisher: Trans Tech Publications Inc.
Year: 2013
Tongue: English
Weight: 414 KB
Volume: 423-426
Category: Article
ISSN: 1660-9336
DOI: 10.4028/www.scientific.net/AMM.423-426.756

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