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Effect of resonance charge exchange between argon ions on the effective sputtering rate in a magnetron discharge

✍ Scribed by I. Yu. Burmakinskii; A. V. Rogov

Book ID: 110137659
Publisher: Springer
Year: 2004
Tongue: English
Weight: 50 KB
Volume: 49
Category: Article
ISSN: 1063-7842
DOI: 10.1134/1.1642690

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