Effect of reactive gas pressure on the plasma parameters during triode ion plating of Cr−C films

✍ Scribed by Marijan Maček; Miha Čekada; Peter Panjan; Martin Mišina

• Publisher: Springer
• Year: 2000
• Tongue: English
• Weight: 150 KB
• Volume: 50
• Category: Article
• ISSN: 0011-4626
• DOI: 10.1007/bf03165918