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Effect of PVD process parameters on the quality and reliability of thin (10–30

✍ Scribed by Shibesh Dutta; Sivaramakrishnan Ramesh; Balakrishnan Shankar; Sundar Gopalan

Book ID
107689566
Publisher
Springer-Verlag
Year
2011
Tongue
English
Weight
354 KB
Volume
2
Category
Article
ISSN
2190-5509

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In this study, we show that the optical constants of sputter-deposited chromium depend on the argon pressure used for the deposition. Higher argon pressure gives lower extinction coefficients. Sheet resistance measurements show that those materials with lower extinction coefficients also have lower