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Effect of plasma treatment on interface property of BCN/GaN structure

✍ Scribed by Yoshiaki Shimada; Kentaro Chikamatsu; Chiharu Kimura; Hidemitsu Aoki; Takashi Sugino

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 199 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2006.02.016

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