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Effect of physical stress on the degradation of thin SiO2 films under electrical stress

✍ Scribed by Yang, T.-C.; Saraswat, K.C.

Book ID: 114538087
Publisher: IEEE
Year: 2000
Tongue: English
Weight: 235 KB
Volume: 47
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.830989

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