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Effect of photon irradiation on the process of recrystallization of thin metallic films

✍ Scribed by V. M. Ievlev; T. L. Turaeva; A. N. Latyshev; A. A. Sinel’nikov; V. N. Selivanov

Book ID
110177474
Publisher
SP MAIK Nauka/Interperiodica
Year
2007
Tongue
English
Weight
311 KB
Volume
103
Category
Article
ISSN
0031-918X

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In this study, we show that the optical constants of sputter-deposited chromium depend on the argon pressure used for the deposition. Higher argon pressure gives lower extinction coefficients. Sheet resistance measurements show that those materials with lower extinction coefficients also have lower