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Effect of oxygen on ion-beam induced synthesis of SiC in silicon

✍ Scribed by V.V. Artamonov; M.Ya. Valakh; N.I. Klyui; V.P. Melnik; A.B. Romanyuk; B.N. Romanyuk; V.A. Yuhimchuk


Book ID
114170578
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
118 KB
Volume
147
Category
Article
ISSN
0168-583X

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