Effect of oxygen contamination on the properties of the silicon hydrogen alloy materials deposited under conditions near the microcrystalline silicon formation region

✍ Scribed by Namita Dutta Gupta; Partha Chaudhuri

• Book ID: 117145202
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 129 KB
• Volume: 289
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/s0022-3093(01)00723-2