Effect of O2 plasma immersion on electrical properties and transistor performance of indium gallium zinc oxide thin films

✍ Scribed by Liu, P.; Chen, T.P.; Liu, Z.; Tan, C.S.; Leong, K.C.

• Book ID: 121789943
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 510 KB
• Volume: 545
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2013.07.084