Effect of O+ implantation on silicon-silicon dioxide interface properties : M. E. Sproul and A. G. Nassibian. Solid St. Electron. 17, 577 (1974)

• Publisher: Elsevier Science
• Year: 1974
• Tongue: English
• Weight: 108 KB
• Volume: 13
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(74)90099-7