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Effect of Nitridation Rate on the Composition and Conductivity of Titanium Nitride Films Prepared from Sol–Gel Titania

✍ Scribed by Joseph L. Keddie; Jian Li; James W. Mayer; Emmanuel P. Giannelis

Book ID: 110825316
Publisher: John Wiley and Sons
Year: 1991
Tongue: English
Weight: 458 KB
Volume: 74
Category: Article
ISSN: 0002-7820
DOI: 10.1111/j.1151-2916.1991.tb06869.x

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