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Effect of nitric acid on wet etching behavior of Cu/Mo for TFT application

โœ Scribed by Bo-Hyun Seo; Sang-Hyuk Lee; In-Sun Park; Jong Hyun Seo; HeeHwan Choe; Jae-Hong Jeon; Mun-pyo Hong

Book ID
108079422
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
753 KB
Volume
11
Category
Article
ISSN
1567-1739

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