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Effect of N2 anneal on thin HfO2 layers studied by conductive atomic force microscopy

✍ Scribed by J Pétry; W Vandervorst; X Blasco


Book ID
108207319
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
343 KB
Volume
72
Category
Article
ISSN
0167-9317

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