Effect of N doping on properties of diamond-like carbon thin films produced by RF capacitively coupled chemical vapor deposition from different precursors

✍ Scribed by Anita, V.; Butuda, T.; Maeda, T.; Takizawa, K.; Saito, N.; Takai, O.

• Book ID: 122916275
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 231 KB
• Volume: 13
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2004.05.002