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Effect of N doping on properties of diamond-like carbon thin films produced by RF capacitively coupled chemical vapor deposition from different precursors

โœ Scribed by Anita, V.; Butuda, T.; Maeda, T.; Takizawa, K.; Saito, N.; Takai, O.


Book ID
122916275
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
231 KB
Volume
13
Category
Article
ISSN
0925-9635

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