Effect of materials for micro-electro-mechanical systems on PCR yield
β Scribed by Cristina Potrich; Lorenzo Lunelli; Stefania Forti; Diego Vozzi; Laura Pasquardini; Lia Vanzetti; Cristina Panciatichi; Mariano Anderle; Cecilia Pederzolli
- Publisher
- Springer
- Year
- 2009
- Tongue
- English
- Weight
- 370 KB
- Volume
- 39
- Category
- Article
- ISSN
- 1432-1017
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This paper presents a comprehensive comparison study between the generalized differential quadrature (GDQ) and the well-known global Galerkin method for analysis of pull-in behavior of nonlinear micro-electro-mechanical coupled systems. The nonlinear governing integro-differential equation for doubl