Effect of irradiation with low-energy Ar ions on the characteristics of the working and rear sides of single-crystal GaAs substrate

✍ Scribed by A. S. Alalykin; P. N. Krylov; I. V. Fedotova; A. B. Fedotov

• Book ID: 110134187
• Publisher: Springer
• Year: 2003
• Tongue: English
• Weight: 57 KB
• Volume: 37
• Category: Article
• ISSN: 1063-7826
• DOI: 10.1134/1.1568466