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Effect of incident angles on the morphology of silicon nanocone array induced by Ar+ sputtering at room temperature

✍ Scribed by Zhao, X.; Li, Q.; Shi, Q.; Xue, S.; Li, Z.; Liu, Y.

Book ID: 117813491
Publisher: The Institution of Engineering and Technology
Year: 2012
Tongue: English
Weight: 200 KB
Volume: 7
Category: Article
ISSN: 1750-0443
DOI: 10.1049/mnl.2012.0374

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