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Effect of incident angle of target molecules on electrical property of Al-doped ZnO thin films prepared by RF magnetron sputtering

โœ Scribed by Sang-Hwan Lee; Jae Hak Jung; Soo-Hyun Kim; Do-Kyung Lee; Chan-Wook Jeon


Book ID
108079225
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
320 KB
Volume
10
Category
Article
ISSN
1567-1739

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