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Effect of hydrogen radicals on properties and structure of a-Si1−xCx:H films

✍ Scribed by Akimori Tabata; Hirotaka Kamijo; Yasuo Suzuoki; Teruyoshi Mizutani


Book ID
117148943
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
126 KB
Volume
227-230
Category
Article
ISSN
0022-3093

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