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Structural modification of laser annealed a-Si1−xCx:H films

✍ Scribed by U. Coscia; G. Ambrosone; C. Minarini; V. Parisi; S. Schutzmann; A. Tebano


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
245 KB
Volume
252
Category
Article
ISSN
0169-4332

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Structural and optical properties of a-S
✍ Aïssa Keffous; Abdelhak Cheriet; Youcef Belkacem; Noureddine Gabouze; Assia Bouk 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 731 KB

Hydrogenated amorphous SiC films (a-Si 1-x C x :H) were prepared by dc magnetron sputtering technique on p-type Si(1 0 0) and corning 9075 substrates at low temperature, by using 32 sprigs of silicon carbide (6H-SiC). The deposited a-Si 1-x C x :H film was realized under a mixture of argon and hydro