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Effect of hydrogen on the physical and mechanical properties of silicon carbide-derived carbon films

โœ Scribed by Hyun-Ju Choi; Heung-Taek Bae; Michael J. McNallan; Yong-Ho Sohn; Dae-Soon Lim

Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
421 KB
Volume
204
Category
Article
ISSN
0257-8972

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