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Effect of halogen in high-density oxygen plasmas on photoresist trimming

✍ Scribed by Chian-Yuh Sin; Bing-Hung Chen; W. L. Loh; J. Yu; P. Yelehanka; A. See; L. Chan

Publisher: American Institute of Chemical Engineers
Year: 2004
Tongue: English
Weight: 290 KB
Volume: 50
Category: Article
ISSN: 0001-1541
DOI: 10.1002/aic.10145

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