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Effect of H-implantation in the local elastic properties of silicon crystals

โœ Scribed by Reboh, S.; Rieutord, F.; Vignoud, L.; Mazen, F.; Cherkashin, N.; Zussy, M.; Landru, D.; Deguet, C.


Book ID
123618821
Publisher
American Institute of Physics
Year
2013
Tongue
English
Weight
593 KB
Volume
103
Category
Article
ISSN
0003-6951

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