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Effect of fluorine contamination on barrier metal oxidation

โœ Scribed by S. Ozaki; Y. Nakata; Y. Kobayashi; T. Nakamura; Y. Iba; S. Fukuyama; H. Watatani; Y. Ohkura

Book ID
104052405
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
461 KB
Volume
87
Category
Article
ISSN
0167-9317

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