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Effect of film thickness and annealing temperature on hillock distributions in pure Al films

✍ Scribed by Soo-Jung Hwang; Je-Hun Lee; Chang-Oh Jeong; Young-Chang Joo


Book ID
113896422
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
397 KB
Volume
56
Category
Article
ISSN
1359-6462

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