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Effect of epitaxial realignment on the leakage behavior of arsenic-implanted, as-deposited polycrystalline Si-on-single crystal Si diodes

✍ Scribed by Shubneesh Batra; Nanseng Jeng; Akif Sultan; Kyle Picone; Surya Bhattacharya; Keun-Hyung Park; Sanjay Banerjee; David Kao; Monte Manning; Chuck Dennison

Book ID: 112817876
Publisher: Springer US
Year: 1993
Tongue: English
Weight: 586 KB
Volume: 22
Category: Article
ISSN: 0361-5235
DOI: 10.1007/bf02661629

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Study of lateral non-uniformity as a function of junction depth in ultra-shallow junctions and its effect on leakage behavior in as-deposited polycrystalline Si and amorphous Si diodes

✍ Shubneesh Batra; Kyle Picone; Keun Hyung Park; Suryanarayana Bhattacharya; Sanja 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 1020 KB