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Effect of dimensional parameters on the current of MSM photodetector

✍ Scribed by A.D. Zebentout; Z. Bensaad; M. Zegaoui; A. Aissat; D. Decoster

Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
793 KB
Volume
42
Category
Article
ISSN
0026-2692

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πŸ“œ SIMILAR VOLUMES

Effect of AlN film thickness on photo/da
Effect of AlN film thickness on photo/dark currents of MSM UV photodetector
✍ Ru-Yuan Yang; Chin-Min Hsiung; Hsuan-Hsu Chen; Hung-Wei Wu; Ming-Chang Shih πŸ“‚ Article πŸ“… 2008 πŸ› John Wiley and Sons 🌐 English βš– 378 KB

## Abstract In this article, we have successfully fabricated the metal‐semi‐conductor‐metal (MSM) UV photodetector using the aluminum nitride‐based (AlN) film as an active layer grown on p‐type Si (100) by a dc sputtering deposition. Effect of AlN thickness of 500, 1500, and 2500 nm on the surface