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Effect of dimensional laser machining on the structure and properties of silicon nitride

✍ Scribed by A. V. Lavrinovich; Ya. A. Kryl'; I. M. Androsov; S. A. Artemyuk

Publisher
Springer
Year
1990
Tongue
English
Weight
844 KB
Volume
29
Category
Article
ISSN
1573-9066

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