✦ LIBER ✦

Effect of Diluent Gases on Growth Behavior and Characteristics of Chemically Vapor Deposited Silicon Carbide Films

✍ Scribed by Han-Su Kim; Doo-Jin Choi

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Growth Mechanism of Silicon Carbide Film

✍ Satoru Tanaka; Hiroshi Komiyam 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 552 KB

Analysis of vapor-deposited silicon carb

✍ Yang, K. H. ;Schwuttke, G. H. 📂 Article 📅 1978 🏛 John Wiley and Sons 🌐 English ⚖ 682 KB

Oxidation Behavior of Chemically-Vapor-D

✍ Dennis S. Fox 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 495 KB

Microstructure and composition of silico

✍ D. Dietrich; H. Podlesak; G. Marx; B. Wielage 📂 Article 📅 1998 🏛 Springer 🌐 English ⚖ 336 KB

Chemical Vapor Deposition of Silicon Car

✍ Govindhan Dhanaraj; Yi Chen; Hui Chen; Dang Cai; Hui Zhang; Michael Dudley 📂 Article 📅 2007 🏛 Springer US 🌐 English ⚖ 513 KB

Morphologies and growth mechanisms of zi

✍ Qiaomu Liu; Litong Zhang; Laifei Cheng; Yiguang Wang 📂 Article 📅 2008 🏛 Springer US 🌐 English ⚖ 373 KB