Effect of dc negative-bias and silicon introduction on performance of Si–B–N composite film by RF-PECD technique

✍ Scribed by Meng Hua; Yu Xiang; Yu Junfeng; Wang Chengbiao

• Book ID: 103816271
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 212 KB
• Volume: 245
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2004.09.072